Electrical and Computer Engineering Publications
Micromorphology analysis of sputtered indium tin oxide fabricated with variable ambient combinations
Document Type
Article
Publication Date
6-1-2018
Volume
220
Journal
Materials Letters
First Page
169
URL with Digital Object Identifier
10.1016/j.matlet.2018.03.005
Last Page
171
Abstract
This study experimentally investigates the fractal nature of DC magnetron sputtered indium-tin oxide (ITO) fabricated utilizing mixed ambient combinations and post-annealed at 450 °C in air towards solar cell applications. The structural properties of the films were examined by X-ray diffraction technique. In addition, three-dimensional (3-D) surface morphology of the films was analyzed using the areal autocorrelation function and pseudo-topothesy K for the atomic force microscopy images. The fractal nature of films was co-related with respect to electrical and optical properties of ITO films prepared under five different ambient conditions.
