Effects of substrate temperature on indium gallium nitride nanocolumn crystal growth

Authors

S. Keating, Queen’s University
M. G. Urquhart, Queen’s University
D. V.P. McLaughlin, Queen’s University
J. M. Pearce, Queen’s UniversityFollow

Document Type

Article

Publication Date

2-2-2011

Volume

11

Issue

2

Journal

Crystal Growth and Design

First Page

565

URL with Digital Object Identifier

10.1021/cg101450n

Last Page

568

Abstract

Indium gallium nitride films with nanocolumnar microstructure were deposited with varying indium content and substrate temperatures using plasma-enhanced evaporation on amorphous SiO2 substrates. Field emission scanning electron microscopy and X-ray diffraction results are presented, showing that more crystalline nanocolumnar microstructures can be engineered at lower indium compositions. Nanocolumn diameter and packing factor (void fraction) was found to be highly dependent on substrate temperature, with thinner and more closely packed nanocolumns observed at lower substrate temperatures. © 2010 American Chemical Society.